We design and manufacture innovative sources (ion, electron, plasma & atom) based on ultracompact ultralow power ECR technology.

APPLICATIONS

NEUTRALIZATION

ELECTRON CHEMISTRY

ETCHING

SPUTTERING

SURFACE ACTIVATION

BEAM LINE

ACCELERATOR

MASS SPECTROMETRY

FIGURING

SURFACE MODIFICATION

TES, OUR NEW GENERATION OF ION & ELECTRON SOURCES

Built around the most compact microwave plasma cavity on the market

The TES product line is based on a unique, simple, reliable, compact ECR bipolar technology :

> Any gas
> Ions or electrons
> Positive or negative ions
> Low or high intensity : 1 µA to 100 mA (e-)
> High brightness or broad beam
> Low Maintenance
> No cooling

Our offer : reliable ECR technology that is easy to integrate, delivers stable long-term performance with low maintenance, with technical support from recognized experts.

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Compact ECR plasmas

Our unique ultracompact and ultralow power ECR technology allows us to construct ion and electron beams of any size and shape.

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Custom ion beam design

It is our pride and joy to deliver the ion beam you need: small or large, circular or rectangular, our design team is at your disposal.

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Industrial project management

With experience in both industry and academia the Polygon Physics team knows what is involved in bringing a project to full fruition.