We design and manufacture innovative sources (ion, electron, plasma & atom) based on ultracompact ultralow power ECR technology.
APPLICATIONS
NEUTRALIZATION
ELECTRON CHEMISTRY
ETCHING
SPUTTERING
SURFACE ACTIVATION
BEAM LINE
ACCELERATOR
MASS SPECTROMETRY
FIGURING
SURFACE MODIFICATION
TES, OUR NEW GENERATION OF ION & ELECTRON SOURCES
Built around the most compact microwave plasma cavity on the market
The TES product line is based on a unique, simple, reliable, compact ECR bipolar technology :
> Any gas
> Ions or electrons
> Positive or negative ions
> Low or high intensity : 1 µA to 100 mA (e-)
> High brightness or broad beam
> Low Maintenance
> No cooling
Our offer : reliable ECR technology that is easy to integrate, delivers stable long-term performance with low maintenance, with technical support from recognized experts.
Compact ECR plasmas
Our unique ultracompact and ultralow power ECR technology allows us to construct ion and electron beams of any size and shape.
Custom ion beam design
It is our pride and joy to deliver the ion beam you need: small or large, circular or rectangular, our design team is at your disposal.
Industrial project management
With experience in both industry and academia the Polygon Physics team knows what is involved in bringing a project to full fruition.
