Compositional and structural change
The goal of ion implantation is to add ions to the interior of a substrate to change its material properties. The incoming ions change the elemental composition, but they also induce a structural change because they transfer energy and momentum to the substrate. The penetration depth of the ions can be tuned with the ion energy and depends on the charge and type of ion and the nature of the substrate. Our ion sources typically deliver singly charged ions.
What happens subsurface
Ion implantation applications
Ion implantation is used for example in tool steel toughening, medical implants, and in semiconductor device fabrication. Some of the surface properties that can be modified are:
- corrosion oxidation
- dielectric properties
- magnetic properties
Ion implantation & Polygon Physics
The Polygon Physics team has experience with building custom ion implantation systems to treat surfaces of up to half a meter wide (500 mm), with beam energies up to 70kV. We are looking forward to an opportunity to further exploit our scalable technology so contact us if this may be of interest to you.