Custom beam solutions

We see our ECR plasma cavities as little building blocks that can serve as individual plasma sources, ion sources, electron sources, or atom sources, but that can also be grouped together to create plasma sheets or ion beams of basically any size and shape. Whether...

Multi Beam Sputter Deposition Systems

Our answer to the demand for higher throughput in multicomponent materials research: multi beam sputter deposition. A unique geometry for thin film deposition based on ion beam sputtering, with multiple ion beams generated by our ultracompact and ultralow power ECR...

Multifunctional surface treatment systems

One ion source, multiple surface treatments. Polygon Physics offers a package deal for R&D purposes: a single system with which you can do a series of surface processing steps on the same sample without having to breaking the vacuum. Multiple surface processing...