TES | Ion mill

TES | Ion mill Polygon Physics’ TES Ion mill delivers focused ion beams for ion milling and ion beam figuring purposes with energies up to 30keV.  For other surface processing applications, please look at our other TES and HEXAR sources. Don’t hesitate to...

TES | Electron source / Neutralizer

TES | Electron source / Neutralizer Our TES Electron Source is mainly developed as a neutralizer for ion beam processing, particularly suited for reactive gas environments. It delivers electron beams with a current up to 75mA with an energy up to 500eV. It can be...

TES | Ion mill

TES | Ion mill Polygon Physics’ TES Ion mill delivers focused ion beams for ion milling and ion beam figuring purposes with energies up to 10 keV. It can be mounted directly onto a CF40 or KF40 flange, but also remotely through flexible cables to allow for source...

TES | High brightness ion source

TES | High brightness ion source Polygon Physics’ TES High Brightness ion source is mainly developed as injection source for optical systems of FIBs, accelerators, and surface analysis equipment. This source can generate parallel ion beams of up to ±30keV. For lower...

TES | Single-cavity ECR-plasma based sources

TES | Single-cavity ECR-plasma based sources TES is a family of ion sources, electron sources, plasma sources, and atom sources, based on patented mono-cavity ECR technology.Starting from the same core element a wide variety of sources can be built, ranging from a...

HEXAR | Broad Beam ECR source

HEXAR | Broad Beam ECR source Polygon Physics’ HEXAR is a broad beam ion source designed for surface processing in vacuum. HEXAR is a scalable concept that enables the fabrication of sources adapted to the treatment of a wide range of surface sizes. Typical...