TES | Electron source / Neutralizer

TES | Electron source / Neutralizer Our TES Electron Source is mainly developed as a neutralizer for ion beam processing, particularly suited for reactive gas environments. Source concept The core element of TES is a patented microwave discharge system (ECR-plasma)...

TES | Ion mill

TES | Ion mill Polygon Physics’ TES Ion mill delivers focused ion beams for ion milling and ion beam figuring purposes with energies up to 30keV. Source concept The core element of TES is a patented microwave discharge system (ECR-plasma) that operates at ultralow...

TES | Ion mill

TES | Ion mill Polygon Physics’ TES Ion mill delivers focused ion beams for ion milling and ion beam figuring purposes with energies up to 30keV. For other surface processing applications, please look at our other TES and HEXAR sources. Don’t hesitate to contact...

HEXAR | Broad Beam ECR source

HEXAR | Broad Beam ECR source Polygon Physics’ HEXAR is a broad beam ion source designed for surface processing in vacuum. HEXAR is a scalable concept that enables the fabrication of sources adapted to the treatment of a wide range of surface sizes. Typical...

IE-GUN | ECR source for high energy beams

IE-GUN | ECR source for high energy beams Plug & Play up to 50kV IE-gun is our single cavity ECR source module for plug & play high energy ion or electron beams. It can be configured up to 50kV, and mounted on any vacuum system with a 160mm (<30kV: 100mm)...

Custom beam solutions

Custom beam solutions We see our ECR plasma cavities as little building blocks that can serve as individual plasma sources, ion sources, electron sources, or atom sources, but that can also be grouped together to create plasma sheets or ion beams of basically any size...